Evolving MEMS Resonator Designs for Fabrication

Created by W.Langdon from gp-bibliography.bib Revision:1.4192

  author =       "Gregory Hornby and William F. Kraus and 
                 Jason D. Lohn",
  title =        "Evolving MEMS Resonator Designs for Fabrication",
  booktitle =    "Proceedings of the 8th International Conference
                 Evolvable Systems: From Biology to Hardware, ICES
  year =         "2008",
  editor =       "Gregory Hornby and Luk{\'a}s Sekanina and 
                 Pauline C. Haddow",
  series =       "Lecture Notes in Computer Science",
  volume =       "5216",
  pages =        "213--224",
  address =      "Prague, Czech Republic",
  month =        sep # " 21-24",
  publisher =    "Springer",
  bibsource =    "DBLP, http://dblp.uni-trier.de",
  keywords =     "genetic algorithms, genetic programming",
  isbn13 =       "978-3-540-85856-0",
  URL =          "http://idesign.ucsc.edu/pubs.html",
  DOI =          "doi:10.1007/978-3-540-85857-7_19",
  bibsource =    "DBLP, http://dblp.uni-trier.de",
  abstract =     "Because of their small size and high reliability,
                 microelectromechanical (MEMS) devices have the
                 potential to revolution many areas of engineering. As
                 with conventionally-sized engineering design, there is
                 likely to be a demand for the automated design of MEMS
                 devices. Here we present our work in using an
                 evolutionary algorithm and generative representation to
                 automatically create designs for a MEMS meandering
                 resonator and describe what is involved in having these
                 designs fabricated. To produce designs that are likely
                 to transfer to reality, we give two ways to modify
                 evaluation of designs: using fabrication noise,
                 differences between the actual dimensions of the design
                 and the design blueprint, which has helped us in our
                 work in evolving antennas and robots; and including
                 prestress, to model the warping that occurs during the
                 extreme heat of fabrication. We have had the best
                 evolved designs fabricated with a commercial MEMS
                 fabrication process and are currently in the process of
                 testing designs to verify how closely the actual
                 devices compare to simulation performance.",

Genetic Programming entries for Gregory S Hornby William F Kraus Jason Lohn