Applications in IC Manufacturing

Created by W.Langdon from gp-bibliography.bib Revision:1.4448

  title =        "Applications in IC Manufacturing",
  author =       "Daniel R. Lewin and Sivan Lachman-shalem and 
                 Benyamin Grosman",
  booktitle =    "16th IFAC World Congress",
  year =         "2005",
  editor =       "Pavel Zitek",
  address =      "Prague, Czech Republic",
  month =        jul # " 4-8",
  keywords =     "genetic algorithms, genetic programming, integrated
                 circuit manufacturing, process systems engineering,
                 model-based control, process monitoring, yield
  annote =       "The Pennsylvania State University CiteSeerX Archives",
  bibsource =    "OAI-PMH server at",
  language =     "en",
  oai =          "oai:CiteSeerX.psu:",
  rights =       "Metadata may be used without restrictions as long as
                 the oai identifier remains attached to it.",
  URL =          "",
  URL =          "",
  size =         "6 pages",
  abstract =     "The manufacture of integrated circuits is driven by a
                 demand for faster calculation capabilities and lower
                 costs, which will require the development of a new
                 generation of manufacturing tools to increase yield
                 productivity, spearheaded by improved measurement
                 devices and advanced process control. The objectives of
                 this paper are review of the challenges in two main PSE
                 areas: process monitoring and process control. PSE
                 solutions appropriate for these challenges involve
                 harnessing multivariate statistics, automated modelling
                 approaches like genetic programming, and multivariable
                 model-based control. The paper is illustrated with
                 several example applications, all tested in",
  notes =        "",

Genetic Programming entries for Daniel R Lewin Sivan Lachman-Shalem Benyamin Grosman