The role of process system engineering (PSE) in integrated circuit (IC) manufacturing

Created by W.Langdon from gp-bibliography.bib Revision:1.4504

  author =       "Daniel R. Lewin and Sivan Lachman-Shalem and 
                 Benyamin Grosman",
  title =        "The role of process system engineering (PSE) in
                 integrated circuit (IC) manufacturing",
  journal =      "Control Engineering Practice",
  year =         "2006",
  volume =       "15",
  number =       "7",
  pages =        "793--802",
  month =        jul,
  note =         "Special Issue on Award Winning Applications, 2005 IFAC
                 World Congress",
  keywords =     "genetic algorithms, genetic programming, Integrated
                 circuit manufacturing, Process systems engineering,
                 Model-based control, Process monitoring, Yield
  DOI =          "doi:10.1016/j.conengprac.2006.04.003",
  abstract =     "The manufacture of integrated circuits is driven by a
                 demand for faster calculation capabilities and lower
                 costs, which will require the development of a new
                 generation of manufacturing tools to increase yield
                 productivity, spearheaded by improved measurement
                 devices and advanced process control. The objectives of
                 this paper are to review of the challenges in applying
                 two areas of expertise in process systems engineering
                 (PSE), namely process monitoring and control, and to
                 motivate more academics working in PSE to get actively
                 involved. PSE solutions appropriate for these
                 challenges involve harnessing multivariate statistics,
                 automated modelling approaches like genetic
                 programming, and multivariable model-based control. The
                 paper is illustrated with several example applications,
                 all tested in fabrication facilities in Israel.",

Genetic Programming entries for Daniel R Lewin Sivan Lachman-Shalem Benyamin Grosman