Genetic Programming Articles by Sivan Lachman-Shalem
Daniel R. Lewin and Sivan Lachman-Shalem and Benyamin Grosman.
The role of process system engineering (PSE) in integrated circuit (IC) manufacturing.
Control Engineering Practice, 15(7):793-802, 2006.
Special Issue on Award Winning Applications, 2005 IFAC World Congress.
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Benyamin Grosman and Sivan Lachman-Shalem and Raaya Swissa and D. R. Lewin.
Yield enhancement in photolithography through model-based process control: average mode control.
IEEE Transactions on Semiconductor Manufacturing, 18(1):86-93, 2005.
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